陶瓷類總覽表
| 原廠料號 | 品名 | 邑維料號 | 照片 |
|---|---|---|---|
| 0200-09735 | COVER, CLAMP RING NO HOLES | A-511-G913050 |  |
| 0200-09747 | Cover ring |  |
|
| 0200-09759 | Ceremic shield 150mm pedestal | A-511-9112409 |  |
| 0200-09768 | Isolator WSIX | A-211-0309066 | |
| 0200-09827 | Ring pedestal ESC 200mm notch | ||
| 0200-09828 | Ring focus ESC 200/201mm | ||
| 0200-09850 | Ring shadow 3mm WCVD | C-211-0309322 |  |
| 0200-10074 | Lift pin, delta MF nitride XP, 200mm | A-511-V615071 |  |
| 0200-10074 REV A | Pin wafer lift ceramic hoop 200mm P chuck | C-211-6112228 |  |
| 0200-10087 | Outer ring, 1.5” SSGD R2 chamber | ||
| 0200-10144 | Insulator pumping plate, dxz |  |
|
| 0200-10163 | Isolator pumping lid for DxZ | ||
| 0200-10164 | Pumping insert ceramic | 211-4106372 |  |
| 0200-10169 | Plate, cover, edge | ||
| 0200-10203 | Lift pin (finger) | C-211-0309390 |  |
| 0200-10284 | Pin lift heater dxz | C-211-6111282 |  |
| 0200-10377 | RIing, single 195mm semi NT for DPS | A-511-B913259 |  |
| 0200-11840 | Ceramic Holder | C-211-J412232 |  |
| 0200-12371 REV 01 | Ceramic Tube φ18 | C-211-6111558 |  |
| 0200-12372 REV 01 | Ceramic Tube φ23.5 | C-211-6111557 | |
| 0200-18053 | Guide lift pin | ||
| 0200-18078 | Collar, 200mm SNNF, Ultima | ||
| 0200-18081 | Cover low profile HDP-CVD ultima | A-511-C112694 |  |
| 0200-18082 | Nozzle | A-511-C112696 | |
| 0200-18090 | Insulator, clampless, in-situ tem test | ||
| 0200-18093 | Nozzle | A-511-C112695 |  |
| 0200-18095 | Collar mini contact 200mm | ||
| 0200-18109 | Collar, SNNF, SML Flt, Ultima | ||
| 0200-20210 | Insert, double RF connector, vectra IMP | C-211-6112229 | |
| 0200-20283 | Pedestal cover upper | ||
| 0200-20331 | Cover ring ,8 | A-511-L614255 | |
| 0200-35290 | Housing, Gas Feed, Nozzle DPS MEC | C-211-6111210 |  |
| 0200-35291 | Plug, Inner, Gas Nozzle, DPS MEC | C-211-6109875 | |
| 0200-35295 | Housing, Gas Feed, Nozzle, DPS A3 chamber | C-212-6107506 |  |
| 0200-35323 | Ring capture 195mm | C-211-0113437 | |
| 0200-35324 | Ring focus, single (notch) | ||
| 0200-35326 | Ring focus (notch) | ||
| 0200-35525 | Resistor Ceramic Near Net Shape | C-211-6111348 | |
| 0200-35528 | Pin isolator spacer 300mm producer | C-211-6111555 | |
| 0200-35702 | Ring, edge, DxZ |  |
|
| 0200-36105 | Insert, plate, txz, chamber | ||
| 0200-36373 | Pin lift | C-211-6111172 |  |
| 0200-36418 | Ceramic cover | A-511-P213109 |  |
| 0200-36649 | Plate, finger lift ring, 200mm producer | A-211-4107529 |  |
| 0200-36666 | Ceramic isolator producer 200mm | A-211-4107530 |  |
| 0200-39133 | Window, Endpoint | C-211-6111235 |  |
| 0200-39135 | Window, Manometer DPS Poly | C-211-6109876 |  |
| 0200-39296 | Aperture plate |  |
|
| 0200-39324 | Insert ring, chamber, ceramic | 211-4106373 |  |
| 0200-39361 | Isolator, silane pumping ring | ||
| 0200-40156 | Lift pin ceramic long | A-511-C112691 |  |
| 0200-66218 | Pin bushing loose | A-211-0711343 |  |
| 0200-71240 | Side Pin | C-211-0711292 |  |
| 0200-71240 R2 | Side pin(63mm) | C-211-0709020 |  |
| 0200-71703 | Insulator,RF,short 5500A | ||
| 0200-71704 | Insulator,RF,long 5500A | ||
| 0200-9672 | Clamp ring | ||
| 1380-000929-11 | C/S Pincette | CER-R-145 |  |
| 15-00043-02 | Adjuster ceramic gas plate | A-511-6207352 |  |
| 15-00475-00 | Insulator, feedthru ceramic | C-211-0309321 |  |
| 15-00699-01 | Finger,fork | A-511-9113499 |  |
| 15-00866-00 | Alox Pin | C-211-6111234 |  |
| 15-01111-00 | Paddle, 150mm optical | A-511-M513590 |  |
| 15-029071-00 | Adapter Xring, Locator | A-511-9112981 |  |
| 15-11606-00 | Insulator, Gas Dist | A-211-9112248 |  |
| 1A10-419286-13 | Screw cap, vac m18 | ||
| 1A10-419302-13 | Screw cap, vac m12 | ||
| 2-39-55387 | Arm, vacuumless, ceramic, 150 mm, IDA | ||
| 2-39-55389 | Vacuunless arm ceramic 6” DNS | C-211-9114834 |  |
| 2-F3-31399 | Arm, IH arm L=90mm, DNS | C-211-0310692 | |
| 2-F3-38335 | Arm, IH arm L=135mm, (2-F3-38335) | C-211-0310693 |  |
| 2-F3-83246 | Scrubber arm | C-211-0308715 |  |
| 2-F3-83247 | IH arm | C-211-0308933 |  |
| 310-290647-7 | Pincette | C-211-J612357 |  |
| 70050-70040 | Vacuum pencil | ||
| 70055-00925 | Shield plate | ||
| 70055-70851A | Buffer plate eagle 10 | ||
| 716-0011571-001 | WASHER 1/4 TURU | C-211-0312734 |  |
| 716-006721-001 | Ring, Insulator | A-511-4407253 |  |
| 716-011540-001 | Ring, Face, Upper Electrode | A-511-9112364 |  |
| 716-011570-001 | Orifice filler W/C ceramic | A-511-9112347 |  |
| 716-011830-006 | Ring, Focus | ||
| 716-030135-001 | Focus ring, 8” ESC | ||
| 716-330045-004 | Ring edge, ,8″ notched, shadow ring, ,ESC |  |
|
| 716-330121-001 | Window, RF shaped ceramic FXD gap | A-511-9112078 |  |
| 716-330122-003 | Top plate | A-211-4107282 |  |
| 716-330167-161 | Clamp Ring, Lam 9600 |  |
|
| 716-330504-061 | Focus 6” gdring jeida ESC | A-211-K112490 |  |
| 716-330890-001 | Ring,8″ base ceramic | A-511-K012782 |  |
| 716-330915-001 | Insulator, ESC 9600XX | A-511-K012783 | |
| BUSHING UPPER SHIELD 01P302 | BUSHING UPPER SHIELD 01P302 | C-211-6114491 |  |
| CAP CERAMIC 0.44 IN WANE | CAP CERAMIC 0.44 IN WANE | C-211-6113435 |  |
| CERAMIC PART | CERAMIC PART | C-211-6116288 |  |
| Collar insulator cast hp ceramic ulvac | Collar insulator cast hp ceramic ulvac | C-211-6114004 |  |
| COLLAR INSULATOR TC/RF HP1024598 | COLLAR INSULATOR TC/RF HP1024598 | C-211-6111255 |  |
| INSULATOR STANDOFF | INSULATOR STANDOFF CR | C-211-6108733 |  |
| INSULATOR STANDOFF CR 1 | INSULATOR STANDOFF CR 1 | C-211-6108485 |  |
| PIN CERAMIC ULVAC 1023403 | PIN CERAMIC ULVAC 1023403 | C-211-6113427 |  |
| PIN LOCKING SHADOW RING INSERT | PIN LOCKING SHADOW RING INSERT | C-211-6114413 |  |
| PIN Water Lift Heater | PIN Water Lift Heater | C-211-6115646 |  |
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