| 原廠料號 |
品名 |
邑維料號 |
照片 |
| 00-672406-00 |
Shutter large, 150mm source |
A-511-9111640 |
 |
| 0015-03310 |
Screw, 8″ Showerhead |
|
|
| 0015-09328 |
Screw, 4-40 * 1/2 Hex |
|
|
| 0020-03379 |
150mm GDP |
A-611-9111505 |
|
| 0020-05809 |
Nut RF feedthru.250″wide vectra imp |
A-611-E610635 |
|
| 0020-09039 |
Strip |
A-511-9111536 |
|
| 0020-09602 |
Manifold input |
A-161-0309053 |
|
| 0020-09609 |
Bushing terminal |
A-511-9112320 |
|
| 0020-10117 |
Teos perf plate OX 200mm |
A-511-F911191 |
|
| 0020-10119 |
Shower head |
A-511-0310787 |
|
| 0020-10192 |
Ring wafer lift 200mm |
A-511-F911190 |
|
| 0020-10482 |
Box temp/level sensor |
A-511-9111199 |
|
| 0020-10888 |
Set screw half dog |
A-511-9111312 |
|
| 0020-23043 |
Shield upper tiN |
A-511-9111196 |
|
| 0020-24914 |
Cover ring 8” |
A-511-9112159 |
|
| 0020-27913 |
Lower shield |
A-511-9111134 |
|
| 0020-27914 |
Shield lower 101 AL |
A-511-9113567 |
|
| 0020-28754 |
PVD endura pedestal, 200 mm |
A-611-E610627 |
|
| 0020-29343 |
Centura dark space shield clamp |
A-611-E610628 |
|
| 0020-30000 |
Clamp pin, Adj BW |
511-1407135 |
|
| 0020-30185 |
Screw PN HD 4-40*.350l AL anod |
A-511-9112319 |
|
| 0020-30302 |
SCR ALUM SKT HD 4-40*25LG 3/32HEX |
A-161-0009566 |
|
| 0020-30329 |
SCR ALUM SKT HD 6-32*1/2LG 7/64HEX |
A-161-0009567 |
|
| 0020-30408 |
SCR ALUM BND HD 2-56*12LG SLO TTED |
A-161-0009607 |
|
| 0020-30797 |
Showerhead perf plate 200mm |
A-511-F911192 |
|
| 0020-31425 |
Mixer, gas box lid BWCVD |
A-511-0307336 |
|
| 0020-31493 |
133 Holes GDP (PE5000-poly) |
511-0305005 |
|
| 0020-32013 |
0020-32013 LID chamber universal |
A-511-9112102 |
|
| 0020-32036 |
Blocker |
A-511-F911194 |
|
| 0020-33538 |
Showerhead perforated plate |
A-511-F911193 |
|
| 0020-34606 |
Plate blocker |
A-511-F911195 |
|
| 0020-35088 |
Shaft.wing 5200 |
A-511-0308097 |
|
| 0020-35474 |
Teflon barrier upper |
511-2506107 |
|
| 0020-35623 |
Insert ring silicon |
A-511-9111521 |
|
| 0020-76065 |
Idle gear robot driver |
A-611-0010665 |
|
| 0020-81482 |
Anti-cath.W/MOD shaft |
A-511-0507487 |
|
| 0020-86735 |
Filament.ARC.chamber,IHC |
A-511-0507486 |
|
| 0021-02395 |
Insert ring, aluminum, DXZ SACVD |
A-511-L512908 |
|
| 0021-10296 |
Output manifold, Univ Ch. W/Align holes |
A-161-C110202 |
|
| 0021-23550 |
Mixer Input manifold 0021-23550 |
A-161-C110201 |
|
| 0040-09095 |
Box, gas box WCVD |
511-0305004 |
|
| 0090-02952 |
Robot motor rotation |
A-511-6210770 |
|
| 0090-02953 |
Motor, Robot Extension |
A-511-6210769 |
|
| 0090-35039 |
Hall effect sensor |
A-511-0308096 |
|
| 0090-70001 |
Elevator motor |
A-511-6210771 |
|
| 0090-75009 |
2 Phase motor encoder assy for robot |
A-511-9008429 |
|
| 0090-75010 |
Motor extension with encoder |
A-511-9008430 |
|
| 0150-09143 |
Cable assy DC power jumper to re mote |
A-511-9112166 |
|
| 0190-13175 |
Light pen |
A-511-0307481 |
|
| 0190-40019 |
Flow switch assy 1.0GPM setpoint |
A-511-9111314 |
|
| 0190-70052 |
Stepping motor drive printed circuit ass |
A-511-6210767 |
|
| 0190-70070 |
Ball bearing |
511-2506108 |
|
| 0200-03636 |
“Screw，Vespel 8-23*.78“ 0200-03636 “ |
A-511-9112932 |
|
| 0200-09626 |
Collar siox/ mlr/nit 150mm flat |
A-611-G911497 |
|
| 0200-09636 |
Plug, SiC w/Head |
A-511-9111215 |
|
| 0200-10446 |
Inset ring notch |
|
|
| 0240-25905 |
KITADV 101 resist button full coverage |
A-611-E610629 |
|
| 1040-01015 |
Flow meter |
A-511-9111197 |
|
| 15-00386-00 |
Washer,#10,nickel |
A-511-9112741 |
|
| 15-00951-00 |
Cup, screw cover |
A-511-9112740 |
|
| 16-00092-00 |
Wire, ceramic bead, short |
A-511-9112738 |
|
| 16-00098-00 |
Wire,ceramic bead,long |
A-511-9112742 |
|
| 17-00094-01 |
Strap, LF bias, alum |
A-511-9112743 |
|
| 17-00148-00 |
Spring, fork |
A-511-9112739 |
|
| 3060-01145 |
Bearing, 375ID*875OD (FR6ZZ FLG) |
A-611-0010656 |
|
| 3060-01221 |
Bbearing ball (ER1634) |
A-611-0010657 |
|
| 3060-01225 |
Bearing,0750 ID*1.625OD (7R12ZZ) |
A-511-9112005 |
|
| 3080-01029 |
Timming belt, 3mm 84t |
A-611-0010658 |
|
| 3690-01179 |
Bellow Screw 1/2″ |
|
|
| 3690-01356 |
Bellow Screw 3/8″ |
A-111-9115400 |
|
| 3690-01383 |
Screw 8/32” x 1/2” |
A-611-9111500 |
|
| 3690-01447 |
SCREW FLAT HD 4-40UNC*1/2L |
A-111-9113233 |
|
| 3690-01628 |
Screw |
A-611-9111502 |
|
| 3690-01629 |
SCREW MACH BTN 4-40 * 1/4L |
A-111-9113234 |
|
| 3690-01717 |
Screw，Buttonhead，Vented SST |
A-511-9112933 |
|
| 3690-02223 |
3690-02223 |
A-611-E610630 |
|
| 3690-02421 |
Screw cap FLT HD 6-32 |
A-611-9111501 |
|
| 3690-02736 |
Clamp ring screw 3/8″ |
A-511-9111539 |
|
| 3880-01004 |
Washer |
A-611-9111512 |
|
| 3880-01452 |
Washer |
A-611-9111508 |
|
| 715-006362-006 |
Screw |
A-311-5207290 |
|
| 715-007469-002 |
Electrode, clear anodized |
A-311-5207288 |
|
| 715-008721-001 |
Electrode, |
A-511-4407254 |
|
| 715-011531-008 |
Electrode, |
A-511-9112343 |
|
| 715-011753-001 |
Plate, upper baffle, 6” |
A-511-9112345 |
|
| 715-011913-080 |
Baffle plate, lower 8″ |
A-511-9112344 |
|
| 716-08854-001 |
Diffuser cathode, 6” |
A-511-4407257 |
|
| 729-061056-005 |
Washer, flat, M5x1, |
A-511-4107284 |
|
| 796-007305-001 |
796-007305-001 |
A-511-9112836 |
|
| 796-028633-010 |
796-028633-010 |
A-511-9112835 |
|
| ES1D02-400048-11 |
Screw,DEPO,A |
121-0106025 |
|
| ES1D10-401106-12 |
Plug |
431-0106028 |
|
| ES1D10-401935-12 |
Screw, blind A (DRM2) |
431-0106027 |
|
| ES1D10-404285-11 |
Pin..adjust (DRM2) |
451-0106026 |
|
